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Valencia, Spain, and Vaassen, The Netherlands – <\/strong>UPVfab, the microfabrication facility at the Universitat Polit\u00e8cnica de Val\u00e8ncia, has upgraded the low-pressure chemical vapor deposition (LPCVD) furnace on its system TS81003 manufactured by Tempress, to expand the portfolio of silicon nitride deposition, that now encompasses both stochiometric and low-stress silicon nitride. The upgrade was funded by the regional government Generalitat Valenciana through project GVA\/IDIFEDER\/2021\/046 \u201cMulti-level Microfabrication Technologies (T-MFAB-MN)\u201d as part of a strategy to equip the facility for micro-fabrication in the technical disciplines of photonics, electronics, and chemical engineering.<\/p>\n Tempress TS81003 system allows for very precise gas flow, temperature and pressure control, which leads to highly tunable material properties such as uniformity and stress levels of the silicon nitride layers. \u201cWe qualified the low stress silicon nitride process at UPVfab with 6 inch wafers\u201d, Rob de Jong, Account Manager at Tempress shared. \u201cThe system can work with many types of wafers up to 8 inch, and as such is unique in Spain\u201d.<\/p>\n \u201cThe Tempress TS81003 system is one of our flagship equipment, with three tubes including automation and process control monitoring, one for thermal processing (wet\/dry oxidation of silicon and sintering), other for deposition of silicon nitride and the third to be upgraded in short for new processes,\u201d said Dr. Gloria Mic\u00f3, Facility Manager for UPVfab. \u201cOur vision is industrial users find at UPVfab the right environment for micro-fabrication, where deposition complementary tools to the Tempress furnace, that provide plasma-enhanced CVD (PECVD) and sputtering systems, as well as lithography tools (mask and mask-less based) up to 8 inch wafers, and wet and dry etching equipment\u201d. UPVfab established a resident company program in 2021. \u201cThe programme builds upon our infrastructure automation and personnel, that are ready to support industrial R&D, prototyping, and small series manufacturing, besides the establishment of demo sites in the cleanroom,\u201d said Prof. Pascual Mu\u00f1oz, Director for UPVfab.<\/p>\n About UPVfab About Tempress Tempress\u2019 technologies and products have advanced the semiconductor industry and we have installed more than 30 GW production capacity in diffusion furnace systems for solar panel production. Tempress\u2019 headquarters is located in Vaassen, The Netherlands. Customers are supported throughout the world by its highly professional direct sales and service people and commercial partner network.<\/p>\n For more information, contact:<\/strong><\/p>\n UPVfab Tempress [\/et_pb_text][\/et_pb_column][\/et_pb_row][\/et_pb_section][et_pb_section fb_built=”1″ _builder_version=”4.11.3″ _module_preset=”default” global_module=”1028″ saved_tabs=”all” global_colors_info=”{}”][et_pb_row _builder_version=”4.16″ _module_preset=”default” global_colors_info=”{}”][et_pb_column type=”4_4″ _builder_version=”4.16″ _module_preset=”default” global_colors_info=”{}”][\/et_pb_column][\/et_pb_row][\/et_pb_section]<\/p>\n","protected":false},"excerpt":{"rendered":" Valencia, Spain, and Vaassen, The Netherlands – UPVfab, the microfabrication facility at the Universitat Polit\u00e8cnica de Val\u00e8ncia, has upgraded the low-pressure chemical vapor deposition (LPCVD) furnace on its system TS81003 manufactured by Tempress, to expand the portfolio of silicon nitride deposition, that now encompasses both stochiometric and low-stress silicon nitride. The upgrade was funded by the regional government Generalitat Valenciana through project GVA\/IDIFEDER\/2021\/046 \u201cMulti-level Microfabrication Technologies (T-MFAB-MN)\u201d as part of a strategy to equip the facility for micro-fabrication in the technical disciplines of photonics, electronics, and chemical engineering. Tempress TS81003 system allows for very precise gas flow, temperature and pressure control, which leads to highly tunable material properties such as uniformity and stress levels of the silicon nitride layers. \u201cWe qualified the low stress silicon nitride process at UPVfab with 6 inch wafers\u201d, Rob de Jong, Account Manager at Tempress shared. \u201cThe system can work with many types of wafers up to 8 inch, and as such is unique in Spain\u201d. \u201cThe Tempress TS81003 system is one of our flagship equipment, with three tubes including automation and process control monitoring, one for thermal processing (wet\/dry oxidation of silicon and sintering), other for deposition of silicon nitride and the third to […]<\/p>\n","protected":false},"author":3,"featured_media":3319,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_et_pb_use_builder":"on","_et_pb_old_content":"","_et_gb_content_width":"1080","footnotes":""},"categories":[13,22,23],"tags":[],"class_list":["post-3316","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news","category-process","category-solution"],"_links":{"self":[{"href":"https:\/\/aandagtvooru.nl\/tempress\/wp-json\/wp\/v2\/posts\/3316","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/aandagtvooru.nl\/tempress\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/aandagtvooru.nl\/tempress\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/aandagtvooru.nl\/tempress\/wp-json\/wp\/v2\/users\/3"}],"replies":[{"embeddable":true,"href":"https:\/\/aandagtvooru.nl\/tempress\/wp-json\/wp\/v2\/comments?post=3316"}],"version-history":[{"count":6,"href":"https:\/\/aandagtvooru.nl\/tempress\/wp-json\/wp\/v2\/posts\/3316\/revisions"}],"predecessor-version":[{"id":3327,"href":"https:\/\/aandagtvooru.nl\/tempress\/wp-json\/wp\/v2\/posts\/3316\/revisions\/3327"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/aandagtvooru.nl\/tempress\/wp-json\/wp\/v2\/media\/3319"}],"wp:attachment":[{"href":"https:\/\/aandagtvooru.nl\/tempress\/wp-json\/wp\/v2\/media?parent=3316"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/aandagtvooru.nl\/tempress\/wp-json\/wp\/v2\/categories?post=3316"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/aandagtvooru.nl\/tempress\/wp-json\/wp\/v2\/tags?post=3316"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}
<\/strong>UPVfab is the micro-fabrication R&D and pilot line facility at Universitat Polit\u00e8cnica de Val\u00e8ncia. The facility comprises 500m2<\/sup>\u00a0<\/span>cleanrooms ISO-7 (class 10.000) and positions to serve with automation tools for backend processing of semiconductor wafers.<\/p>\n
<\/strong>Tempress\u2019 purpose is to support customers in the semiconductors, power, MEMS, photonics, solar, life sciences and coating markets to produce advanced materials and devices with high added value innovative furnace solutions. Tempress\u2019 over 50 years of heritage in developing and producing diffusion and deposition equipment and related processes is a testament to the company\u2019s flexibility, innovation, quality, and dedication.<\/p>\n
<\/strong>Dr. Gloria Mic\u00f3
Facility Manager, UPVfab Microfabrication Facility,
Universitat Polit\u00e8cnica de Val\u00e8ncia
+34.963.879.760
gloria.mico@upv.es<\/a>
https:\/\/www.fab.upv.es\/<\/a><\/p>\n
<\/strong>Mr. Rob de Jong
Account Manager
+31 622664580
rdejong@tempress.nl<\/a>
https:\/\/aandagtvooru.nl\/tempress<\/a><\/p>\n